The present and future of nanolithography

Nanotechnology will play a key role in information science in the 21st century. The fabrication of nanostructures, an important part of nanotechnology, is based upon nanolithography which will be widely employed in the future. We shall first briefly review optical lithography, then describe the development and key issues of several new methods of nanolithography. Prospective applications of nanolithography are discussed at the end.