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The present and future of nanolithography[J]. PHYSICS, 2002, 31(11).
Citation: The present and future of nanolithography[J]. PHYSICS, 2002, 31(11).
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The present and future of nanolithography

  • 中国科学院光电技术研究所微细加工光学技术国家重点实验室 成都 610209

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  • Published Date: November 19, 2002
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  • Nanotechnology will play a key role in information science in the 21st century. The fabrication of nanostructures, an important part of nanotechnology, is based upon nanolithography which will be widely employed in the future. We shall first briefly review optical lithography, then describe the development and key issues of several new methods of nanolithography. Prospective applications of nanolithography are discussed at the end.
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