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The physics of plasma etching[J]. PHYSICS, 2006, 35(08): 693-698.
Citation: The physics of plasma etching[J]. PHYSICS, 2006, 35(08): 693-698.

The physics of plasma etching

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  • Published Date: August 19, 2006
  • The background and progress in the development ofplasma etching processes are reviewed. Studies of the mechanism of capacitively- and inductively-coupled discharges are discussed, especially the key problems of dual frequency capacitively-coupled discharge and plasma sheaths.
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