Low temperature plasma research in China(Ⅰ)
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Abstract
Low temperature plasma physics and technology play an increasingly important role in scientific research in China. Recently observed new phenomenasuch as magnetic reconnection and dusty plasma have aroused new interest in plasma physics. In practice, almost every physics or technology laboratory has some device or instrument involved with or using low temperature plasma., which has led to widespread applied low temperature plasma research in our country, including plasma processing in the microelectronics industry, the preparation of hard or/and anti-corrosion or/and wear-resist materials, nano-materials, surface modification of polymer or bio-materials, and so forth. With the development of low temperature plasma technology, the relevant diagnostic techniques have also improved. The latest progress in low temperature plasma research in China and the areas of chief interest are reviewed.
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