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Introduction to liga technology[J]. PHYSICS, 2002, 31(11).
Citation: Introduction to liga technology[J]. PHYSICS, 2002, 31(11).
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Introduction to liga technology

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  • After an introduction to the background of MEMS we review the principle of LIGA and related technology. The technical requirements of synchrotron radiation lithography are given. The R&D status of MEMS using LIGA is introduced.
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