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Some issues of the material physics for ultra large scale integration(part Ⅱ) giant challenges for the scaled ulsi[J]. PHYSICS, 2002, 31(01).
Citation: Some issues of the material physics for ultra large scale integration(part Ⅱ) giant challenges for the scaled ulsi[J]. PHYSICS, 2002, 31(01).
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Some issues of the material physics for ultra large scale integration(part Ⅱ) giant challenges for the scaled ulsi

  • (1)中国科学技术大学天文和应用物理系,合肥230026

  • (2)中国科学技术大学物理系,合肥230026

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  • Published Date: January 19, 2002
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  • We discuss the giant challenges that material physics faces regarding the structure of CMOS devices, contact resistance, and large diameter silicon wafers when CMOS technology reaches below 100nm.
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