微纳加工技术在光电子领域的应用

Application of nanofabrication to optoelectronics

摘要: 纳米光电子器件正在成为下一代光电子器件的核心.文章介绍了电子束光刻和电感耦合等离子体刻蚀为代表的微纳加工技术在光电子学器件中的应用，主要包括量子点激光器、量子点THz探测器和光子晶体器件.
- 纳米光电子器件 /
- 电子束光刻 /
- 电感耦合等离子体刻蚀 /
- 量子点器件 /
- 光子晶体
Abstract: Nano-scale circuits are becoming the core of optoelectronic devices of the next generation. Nanofabrication by means of electron beam lithography and inductively-coupled-plasma etching is reviewed，focussing mainly on the fabrication of quantum dot lasers, THz quantum dot detectors and photonic crystal devices.
- nano-scale optoelectronic devices /
- electron beam lithography /
- inductively coupled plasma etching /
- quantum dot devices /
- photonic crystal

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