Abstract: In liquid crystal display (LCD) technology, thin-film transistor LCDs are currently favored due to their high-capacity, high-definition, and high-quality full color［1］. The display quality and overall performance of such monitors depend largely on the performance of the thin-film transistors, which are one of a large group of metal-oxide-silicon field-effect transistors［2］. Amorphous silicon thin-film transistor LCDs currently occupy a dominant position in the market as the technology is mature, but its further development is seriously restricted because thin-film transistors have low mobility and conductivity. The pursuit of a suitable replacement with high mobility and conductivity led to great progress in the development of polycrystalline silicon and silicon-ceramic devices. Although the problems have been resolved temporarily to a certain extent, due to the high price and shortage of these materials the dominant position of amorphous silicon has not yet been shaken. Now, nano-silicon thin-film transistor LCDs have become a new focus of attention because of their superior high conductivity, high mobility［4—6］, and the rapid progress of nanotechnology.